마이크로파 플라즈마 광방출스펙트라

초록

The optical spectra of micrewave plasma by four kinds of gases(N2, N2-CH4, H2-CH4 and Air-CH4) have been measured for investigating 388[nm] peak which has the same intensity as Hα(656.4[nm]) peak. A 388.4[nm] peak by N2 plasma, N2-CH4 plasma and Air-CH4 plasma may be CN peak because it is with 337.1 and 316.0[nm] peaks by N2. and a 388.4[nm] peak by H2-CH4 plasma without by N2 337.1, 357.8 and 316.0[nm] peaks may be CH peak. In the investigation results for optical spectra by H2-CH4 plasma and H2-CH4-O2 plasma, the density of hydrogen atom was increased because oxygen decompose hydrogen molecules in H2-CH4 plasma with oxyge. These hydrogen atom decomposed CH4 and increase CH radical. And the crystalline of deposited diamond was good and the growth rate increased.