산란 특성 차이를 활용한 나노범프와 나노홀 구조의 구분 방법

초록

We study the light scattering by two types of nanostructures in different conditions such as incident angles, polarizations and wavelengths, and develop a way to classify the nanobump and nanohole structures. We investigate the best combinations of the incident angle, the polarization and the wavelength to distinguish the nanobump and nanohole by the backward scattering characteristics.