Fabrication of anti-ESD photomask with charge channeling by introducing transparent conductive material between chromium patterns through partial rosion control of resist

제목
Fabrication of anti-ESD photomask with charge channeling by introducing transparent conductive material between chromium patterns through partial rosion control of resist
저자
JEONG DAE YONG
학회명
2020년도 한국재료학회 춘계학술대회 (5.12~5.14)