열처리 공정에 의한 광통신용 광학박막 필터의 중심 파장 이동

초록

Optical thin film filters such as CWDM, 200㎓ and 100㎓ DWDM filters for fiber optical telecommunication were deposited by dual ion beam sputtering method. The center wavelength(CWL) shift of various optical thin film filters was observed for the annealing temperature of 200-400℃ and annealing times of 10-600 minutes. The CWL shifted toward longer wavelengths, to an amount almost linearly proportional to both the annealing time on a common logarithm scale and the annealing temperature.