상세 보기
마그네트론 DC 스퍼터링에 의한 광소자용 거울면의 표면조도 향상
Enhancement of a surface smoothness for Optical MEMS mirror
초록
We have investigated the influence of dry etching parameters on the smoothness of an optical MEMS mirror and also improved its smoothness by depositing gold thin-film on the surface with a Magnetron DC sputtering. The improvement in the surface roughness of an optical MEMS mirror was confirmed by AFM(Atomic Force Microscopy), and the best roughness was measured to be ~15nm(RMS) for final gold layer.
- 제목
- 마그네트론 DC 스퍼터링에 의한 광소자용 거울면의 표면조도 향상
- 제목 (타언어)
- Enhancement of a surface smoothness for Optical MEMS mirror
- 저자
- O BEOM HOAN
- 학회명
- Photonics Conference 2002