이온주입법에 의한 폴리이미드 박막의 표면개질에 대한 연구

초록

We investigated microhardness, friction, wear and wettability of polyimide for finding out the influence of ion implantation on surface properties. For increasing doses microhardness increased. A reduction of the friction coefficient was most cases correlated with a reduction of wear. The contact angles of water for B, N* implanted polyimide decreased from 76。 to zero, as the fluences increased energy of 50, 200keV.