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Effect of AlN Buffer Layer Deposition Temperature on the Characteristics of AlN Epilayers on Si (111)

  • KIM HYUNG SUN
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Effect of AlN Buffer Layer Deposition Temperature on the Characteristics of AlN Epilayers on Si (111)
저자
KIM HYUNG SUN
학회명
한국세라믹학회 (춘계)
개최지
일산 킨텍스
학회 개최일
2014-04-16 ~ 2014-04-18

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