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Atomistic Modeling on Carbon Co-impla with Silicon Pre-amorphization Implant Technique

  • WON TAEYOUNG
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Atomistic Modeling on Carbon Co-impla with Silicon Pre-amorphization Implant Technique
저자
WON TAEYOUNG
학회명
IEEE 2008 Silicon Nanoelectronics Workshop
학회 개최일
2008-06-15 ~ 2008-06-16

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