Effect of Substrate Bias and Temperature on the Structural and Physical Characteristics of nc-Si:H Films Prepared by PECVD

  • CHO NAMHEE
제목
Effect of Substrate Bias and Temperature on the Structural and Physical Characteristics of nc-Si:H Films Prepared by PECVD
저자
CHO NAMHEE
학회명
19th International Photovoltaic Science and Engineering Conference and Exhibition
개최지
ICC, Jeju
학회 개최일
2009-11-09 ~ 2009-11-13