Magnetostrictive properties of Tb0.24Dy0.76Fe 2-xNix thin films for wireless micro actuators and application to array type micro transporter

초록

In this paper, wireless optical system was developed by using array type TbDyFeNi thin film actuator. The effect of Ni content on the magneto-mechanical properties of the Tb0.24Dy0.76Fe2 system, for wireless micro actuator with the effect of deposited film thickness of TbDyFeNi on silicon substrate, was also investigated. To create the device, array shape silicon substrates were bulk micromachined, and Tb0.24Dy 0.76Fe2-xNix, (x=0, 0.5, 1.2, 2.0) films were sputter-deposited on the back side of substrate by selective DC magnetron sputtering techniques. After the sputter process, magnetization and effective mgnetoelastic coupling coefficient and magnetostriction of the sample were measured for the magnetomechanical characterizaztion. For the operation, each branch of the array type actuator has different length and out-ofplane motion. Each branch was actuated by externally applied magnetic fields up to 0.5T and motion of the branches made inclined movement. As a result, deflected angle of the actuator due to the movement of array type actuator to external magnetic fields were observed. © 2010 Copyright SPIE - The International Society for Optical Engineering.