고주파 플라즈마 CVD 다이아몬드 박막의 합성시 첨가된 산소의 효과

초록

Synthetic diamond films were deposited on pretreated silicon substrate in activated gas phase using RF plasma-assisted CVD. We investigated the influence of O2 gas on facets of diamond crystal. In H2-CH4-O2 gas mixture, the increase of oxygen concentration lead to well-faceted diamond particles and increasing crystallinity of diamond films. The deposited diamond films were analyzed by SEM, XRD, Raman spectroscopy.