Silicon Oxide Barrier coating on Flexible Plastic for Display Application

초록

Transparent barrier coatings for displays application, for example SiO2, are now used extensively to reduce the permeation of oxygen and water vapor through flexible plastic. One method to overcome this issue is the use of the pretreatment of substrate with plasma before deposition. we have produced SiO2 transparent barrier layer deposited onto PET(125m) by DC magnetron sputtering in batch type which ungraded by reactive gas inlet and plasma system. PET surface treated by means of Ar/O2 DC plasma. we invested optical constant by ellipsometry, oxygen transmission rate and water permeation in changed thickness.