Microstructural Characterization of C-fiber/Si3N4 Composite Using Semiconductor-Waste-Si Sludge

초록

In the present work, an evaluation study of microstructures of hot pressed Si3N4-(SiCnp/Cf) composites using semiconductor-waste Si sludge has been presented. Nanometer-sized SiC particles were homogeneously distributed in Si3N4 grains and at their boundaries. The surface regions of C-fibers were crystallized with graphite phase and locally reacted with SiC particles. By the dispersion of SiC in Si3N4 grains and C-fibers, the composite was trans- granularly fractured and showed some pulling- out of C-fiber on the fracture surfaces.