레이저 증착법에 의해 형성된 Gd2O3 박막의 구조와 광학적 특성

초록

The pulsed laser deposition(PLD) technology was used for the deposition of phosphor substance, Gd2O3 on commercial glass. An Nd:YAG laser was employed for the deposition (wavelength 266㎚, energy up to 100mJ/pulse, pulse duration is 5㎱ and repetition rate 10 ㎐). With respect to films grown by conventional PLD, this study exhibited the condition at normal temperature. Experiments were done without any reactive gas at a pressure of 10-5∼10-6 Torr using second harmonic(λ=532 ㎚) and fourth harmonic(λ=266 ㎚) Nd:YAG laser. Analyses of the deposited material grown are performed by EDX, AFM, SEM, PL meseurements.