Enhancing the Sensing Capabilities of Resistive-Type Gas Sensors by Surface Modification

초록

The reliable and early-stage detection of hazardous gases has become gradually important in modern society since the 4th industrial revolution. The aim includes safety both in industry and at home, health care, defense of terror and chemical warfare, and environment monitoring. There are a variety of gas sensors, which can be classified according to material, sensing principles, etc. Resistive-type gas sensors have been extensively investigated, due to its merits such as easy fabrication, low cost, adaptability to nanostructures, and potential possibility of attaining extremely high sensing performances. In order to improve sensing performances, significant efforts have been made. In this presentation, we introduce the recent results on modification of sensor surfaces to enhance the sensing performances. Here, various beam-irradiation techniques, in terms of electron beam, helium ion-beam, xenon ion beam, proton beam, laser beam are introduced and discussed.