하이브리드 p-n 접합을 위한 소수성의 ZnO 박막 제작

초록

We have prepared hydrophobic ZnO thin films for substrates of the hybrid p-n junction. The surface of RF sputter-deposited ZnO film was treated by wet etching and by Polydimethyl-siloxane (PDMS) in order to have hydrophobic property. Contact angles of PDMS-treated ZnO are 103.5°, 110.9°, 115.8° at 100, 200, 300W of RF power, respectively.