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Dry Etching of HfO2 Films by Inductively Coupled Plasma
Dry Etching of HfO2 Films by Inductively Coupled Plasma
- 제목
- Dry Etching of HfO2 Films by Inductively Coupled Plasma
- 제목 (타언어)
- Dry Etching of HfO2 Films by Inductively Coupled Plasma
- 저자
- O BEOM HOAN
- 학회명
- AVS 51st International Symposium