양극산화공정과 수열합성법을 이용한 ZnO 나노와이어의 성장

초록

We report a novel fabrication of aligned ZnO nanowires using hydrothermal method and Anodic Aluminium Oxide (AAO) templates. ZnO nanorods are fabricated in AAO templates using hydrothermal method. 100 nm ZnO seed layer were sputtered on Si substrate and 3 um aluminium film was evaporated on the seed layer. AAO template was fabricated by 2-step anodization. The ZnO nanorods were then fabricated into AAO template using hydrothermal synthesis of mixture solution of zinc nitrate hexahydrate and hexamethylenetetramine