Optical properties of photodefinable polyimide and their application to polarization splitter

초록

We report on the optical properties of the photodefinable polyimide according to softbake, hardbake and exposure conditions. The refractive index of the polymer is controlled in the range of 1.5898~1.6078 for TE polarization and 1.5825~1.5931 for TM polarization at a wavelength of 1.5탆. Also a waveguide polarization splitter is designed based on a birefringence value of this material.