Study of Dynamic Behavior of Magnetostrictively Patterned Flexible Micro-Wings

초록

For the design of magnetostrictive MEMS devices, finite-element modeling (FEM), the determination of the magnetostrictive coefficient, and application examples were examined in this paper. The magnetostrictive coefficients are usually calculated by measuring the bending deflection of the cantilever on which magnetostrictive materials are deposited. In most of the research on the magnetostrictive deposited substrate for the derivation of structural formulas, it is commonly assumed that the flexural rigidities of magnetostrictive materials are negligible because magnetostrictive films are much thinner than substrate materials. In this paper, the effect of magnetostrictive thin film's elastic energy on the magnetostrictive coefficient is investigated. A self-coded and developed finite-element program for magnetostrictive actuators is formulated, where magnetic properties are considered as nonlinear, and elastic properties are assumed as linear. As a result, it is potentially shown that magnetostrictive thin-film micropatterned actuators would be accommodated for targeted actuating behavior through an FEM capability for evaluation and selective micropatterning technique for fabrication.

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