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High Etch Selectivity of TaN/HfQ2/Si MIS Structure by Dry and Wet Etching

High Etch Selectivity of TaN/HfQ2/Si MIS Structure by Dry and Wet Etching
  • LEE SEUNG GOL
제목
High Etch Selectivity of TaN/HfQ2/Si MIS Structure by Dry and Wet Etching
제목 (타언어)
High Etch Selectivity of TaN/HfQ2/Si MIS Structure by Dry and Wet Etching
저자
LEE SEUNG GOL
학회명
제14회 한국반도체학술대회

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