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초록
In this paper, we report the three-dimensional simulation result of the damage induced transient enhanced diffusion(TED) simulation by empolying our 3D INPROS system.
- 제목
- Damage Induced TED Simulation by 3D INPROS System
- 제목 (타언어)
- 3D INPROS를 사용한 점결함에 의한 과도증속확산 시뮬레이션
- 저자
- WON TAEYOUNG
- 학회명
- Proceedings of the 5th International Conference on VLSI and CAD (ICVC '97)