Modeling and simulation of electro-statically driven micro-electro-mechanical systems

초록

In this paper, a methodology of modeling and simulating the electro-statically driven micro-electromechanical systems (MEMS) is presented, utilizing topography data with an arbitrary structure. In the methodology, the model are first generated from the mask layout and process recipe of a device, and then descretized by an auto-mesh generation for the finite element analysis. Finally the analysis is performed to solve the Laplace and the dynamic equation at a time. The methodology is applied to an electro-statically driven comb-drive as a test vehicle for verification.