ScholarWorks@인하대학교

상세 보기

Fluorine plasma resistant materials: Y-Si-Al-O-N oxynitride glasses

  • KIM HYUNG SUN
제목
Fluorine plasma resistant materials: Y-Si-Al-O-N oxynitride glasses
저자
KIM HYUNG SUN
학회명
The CJK2009 seminar and summer workshop (Conjugated with the workshop of China-Japan-Korea (CJK) A3 foresight international cooperation key project)
개최지
Phoenix island, Jeju island, Korea

ScholarWorks@인하대학교

22212 인천광역시 미추홀구 인하로 100 정석학술정보관 Tel. 032-860-9003

COPYRIGHT © 인하대학교 All Rights Reserved.

Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.

You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.