Comprehensive TCAD-Based Validation of Interface Trap-Assisted Ferroelectric Polarization in Ferroelectric-Gate Field-Effect Transistor Memory

초록

In this article, the interface trap-assisted ferroelectric polarization in ferroelectric-gate field effect transistors (FeFETs) is investigated based on technology computer-aided design (TCAD) simulations. The metal-ferroelectric-metal (MFM) capacitors and FeFETs are fabricated to reflect ferroelectric and device model parameters to the simulations. By introducing interface traps between ferroelectric layer and Interlayer (FE/IL) and implementing the charge trapping through nonlocal tunneling model, it is revealed that the trapped charges at the FE/IL interface enhance the polarization of the FE, and they determine a memory window (MW) by the compensation between the polarization enhancement and the trapping-induced threshold voltage shift. Furthermore, the effects of the remaining trapped charges depending on a trap relaxation on the MW are rigorously analyzed by monitoring the transient changes of the polarization and the trapped charges in pulse program/read operations.

키워드