Development of low k transparent dielectric from polycarbosilane

  • KIM HYUNG SUN
제목
Development of low k transparent dielectric from polycarbosilane
저자
KIM HYUNG SUN
학회명
International Symposium on New Frontier of Advances Si-Based Ceramics and Composites
개최지
Hyatt hotel, jeju
학회 개최일
2008-06-08 ~ 2008-06-11