Design of a silicon optical micro-ring resonator sensor of improved sensitivity and selectivity

초록

We report on the successful design of a silicon micro-ring resonator for improved sensitivity and selectivity in the optical bio-sensing applications. By controlling the waveguide width w, the radius of the resonator R, and the waveguide separation S, we improved the sensitivity and the selectivity of the micro-ring resonator sensor. We obtained the sensitivity of 0.79nm/0.001, which is a 50% increase over the sensitivity without the reduction of the waveguide width. We obtained the selectivity of more than 3,000 with nearly 100% output intensity. We compared these results with the results obtained from the well-established Finite Difference Time Domain (FDTD) method and found that they are in excellent agreement with each other.