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Design and fabrication of a polymer-based micron-scale semi-spherical vertical interconnecting structure for 3D photonic integrated circuit application

  • LEE EL HANG
제목
Design and fabrication of a polymer-based micron-scale semi-spherical vertical interconnecting structure for 3D photonic integrated circuit application
저자
LEE EL HANG
학회명
SPIE Photonics West 2005,

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