Micro Optical Component Fabrication by Excimer Laser

초록

A microlens fabrication technique, the excimer laser lithography, is developed. This bases on the pulsed laser irradiation and the transfer of a chromium-on-quartz reticle on to the polymer surface with a proper projection optic system. The excimer laser lithography system with 1/4 and 1/20 demagnification ratios was constructed and the photoablation characteristics of the PMMA and polyamide were experimentally examined using the system. For two different shapes of micro lenses, a spherical lens and a cylindrical lens, the fabrication technique was investigated. The results show that the various shapes of micro optical components can be easily fabricated by the excimer laser lithography.