직병렬 유도 안테나를 이용한 대면적 플라즈마 소스에 관한 연구

초록

Inductively coupled large area plasma, which is applicable to LCD processing, is built with a modified single loop RF antenna. Combination of parallel and series paths of RF current through the antenna induces local enhancement of plasma density, which in turn provides uniform plasma density near the substrate. The plasma density distribution is measured and compared with that of the conventional single loop antenna. Anisotropic etching of photoresist is performed, and it is found that etch uniformity is improved by 3% from 15 % of the conventional etcher over 300mm x 350 mm glass substrates. Photoresist etch rate and uniformity can be further improved by applying a periodic weak axial magnetic field.