Optimizing Dielectric Performance and Thermal Stability of BNT-SBT Thick Films via Aerosol Deposition and Polishing

초록

As the electric devices industry advances, the demand for high-energy-density ceramic-based capacitors has surged. To meet this demand, energy storage devices with enhanced thermal stability and efficiency are crucial, as device capacity is highly sensitive to heat. While PZT (PbZr0.5248Ti0.4852O3) has been a widely used perovskite ferroelectric material known for its exceptional dielectric properties and thermal stability, environmental concerns surrounding lead (Pb) have prompted the search for environmentally friendly lead-free ferroelectric alternatives. BNTSBT (6Bi0.5Na0.5TiO3-4Sr0.7Bi0.2TiO3) has garnered attention for its relaxed ferroelectric characteristics and high thermal stability. This study introduced the aerosol deposition method (AD method) to assess the outstanding dielectric properties and thermal stability of BNTSBT. The AD method offers the advantage of depositing ceramic particles at room temperature by applying a powerful physical force, resulting in nano-grain films. To enhance the performance of the thick film fabricated through the AD process, heat treatment and polishing were incorporated after film formation. This approach ensured uniform film properties. By conducting heat treatment at a lower temperature than conventional conditions, delamination issues that typically occur during post-heat treatment were prevented, leading to improved dielectric properties.