Variation in the Nano-structure and Optical Features of nc-Si:H Thin Films with Reaction Gas Conditions

초록

We report the observation of red and blue PL from hydrogenated nano-crystalline thin films at R.T.; the samples were prepared by PECVD. The nano-structural and optical characteristics of the nc-Si thin films were analyzed as a function of deposition conditions, and the relation of the nano-structural features of the films with the optical characteristics was discussed.