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Fabrication of vertical optical interconnecting structure using photoresist reflowed mold structure
Fabrication of vertical optical interconnecting structure using photoresist reflowed mold structure
- 제목
- Fabrication of vertical optical interconnecting structure using photoresist reflowed mold structure
- 제목 (타언어)
- Fabrication of vertical optical interconnecting structure using photoresist reflowed mold structure
- 저자
- O BEOM HOAN
- 학회명
- Micro- & Nano-Engineering 2006