단차가 있는 경우를 위한 2차원 광리소그래피 전산시늉

초록

Using the rigorous diffraction theory based on coupled wave analysis were inverstigated. In this method, the PR system was divided into a lot of thin layers, and internal fields were decomposed into several spatial frequency terms according to Floquet theorem. The relationship between electric and magnetic fields inside PR was given by the space variable representation, and field distributions could be determined from B.C.