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초록
Recently, Graphene have been researching actively due to outstanding properties such as high mobility, high thermal conductivity and high structural stability. In this work, few layer graphene was successfully synthesized from methane gas by using non-transferred DC arc plasma system. Non-transferred thermal plasma offers a high temperature, a steep temperature gradient and high enthalpy to enhance the kinetics of synthesis reaction of graphene. In order to preparation of high quality few layer graphene, graphene which synthesized in several conditions were comparatively analyzed; gap distance between plasma torch and graphite substrate, flow rate of additional reagent gas, the effects with kind of plasma forming gas. Methane gas was injected into plasma jet as carbon source for synthesis of graphene. Thermal plasma jet was generated by argon or argon-hydrogen mixing gas. It was revealed that hydrogen gas improve quality of few layer graphene by the affect of surface etching and affect increasing of plasma power. Synthesized graphene was analyzed by Raman spectroscope with 1064nm and 532nm wavelength and FE-TEM (Field Emission Transmission Electron Microscope).
- 제목
- Synthesis of few layer graphene by non-transferred arc plasma system
- 저자
- DONG WHA PARK
- 학회명
- the 4th International Conference on Microelectronics and Plasma Technology
- 개최지
- 제주도
- 학회 개최일
- 2012-07-04 ~ 2012-07-06