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Inhomogenous refractive index of SiOxFy thin films prepared by ion-beam assisted deposition

  • CHANG KWON HWANGBO
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Inhomogenous refractive index of SiOxFy thin films prepared by ion-beam assisted deposition
저자
CHANG KWON HWANGBO
학회명
SMMIB '1999(Beijing,China)

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