Response of Thin Film Pyroelectric Sensors

  • YOON YUNG SUP

초록

The Pyroelectric response of detectors with a lead-lanthanum-titanium (PLT) sensing element on either a Si and a SiO2 substrate are calculated as functions of the pyroelectric layer and the underlying layer thicknesses. It is found that the detector with an air gap has a frequency-independent responsivity over a wide frequency range. A correlation is found between the type of frequency response in each frequency region and the corresponding dominant mechanism for heat loss.

제목
Response of Thin Film Pyroelectric Sensors
저자
YOON YUNG SUP
학회명
Proceedings of the Eleventh IEEE International Symposium on Applications of Ferroelectrics