Non-Planar Optical Reflector of Large Alignment Tolerance for Optical via Applications

초록

Non-planar optical reflector is important to realize multi-layer integration of photonic devices in VLSI photonics. In this paper, we presents a simple demonstration of a curved shape, non-planar optical reflector and its alignment characteristics. Fabricated optical reflector showed good non-planar optical reflections, and ~1.5 dB loss was measured within 20 μm range of vertical and horizontal misalignments.