식각율 차이를 이용한 곡면 가공

초록

In this paper, resist trimming method was applied to reshape a SU8 based waveguide structure to eliminate Ttopping effect. Resist trimming process was carried with a ICP system, and well-trimmed curved-shape SU8 waveguide was obtained. Developed process provides predictable etch shapes with controlled process conditions, thus can be used to make curved-shape waveguide structures.