하이브리드형 인치웜 선형모터의 개발

초록

In this paper, the development of a hybrid linear motor using inchworm motion is presented. This motor consists of four stacked piezoelectric actuators as claping devices and a magnetostrictive actuator as push device. To maximize the displacement in the clamping device, the FEM analysis of the clamping structure is performed. The push device is designed using magnetostrictive material such that it can produce 62 micrometer with maximum input current. With these clamping and push devices, the linear motor system is made and the performance test is on going.