Change of Scattering Mechanism of Carrier Mobility in MOSFET with La-incorporated HfO2 Gate Dielectric

제목
Change of Scattering Mechanism of Carrier Mobility in MOSFET with La-incorporated HfO2 Gate Dielectric
저자
RINO CHOI
학회명
International Conference on Microelectronics and Plasma Technology 2014
학회 개최일
2014-07-08 ~ 2014-07-11