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Change of Scattering Mechanism of Carrier Mobility in MOSFET with La-incorporated HfO2 Gate Dielectric
- 제목
- Change of Scattering Mechanism of Carrier Mobility in MOSFET with La-incorporated HfO2 Gate Dielectric
- 저자
- RINO CHOI
- 학회명
- International Conference on Microelectronics and Plasma Technology 2014
- 학회 개최일
- 2014-07-08 ~ 2014-07-11