Characterization of High Pressure Hydrogen Annealing Effect on Polysilicon Channel Field Effect Transistors using Isothermal Deep Level Trap Spectroscopy

제목
Characterization of High Pressure Hydrogen Annealing Effect on Polysilicon Channel Field Effect Transistors using Isothermal Deep Level Trap Spectroscopy
저자
RINO CHOI
학회명
ICICDT 2016