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Annealing effects on the structural properties of gold films on Si by the RF magnetron sputtering
Annealing effects on the structural properties of gold films on Si by the RF magnetron sputtering
- 제목
- Annealing effects on the structural properties of gold films on Si by the RF magnetron sputtering
- 제목 (타언어)
- Annealing effects on the structural properties of gold films on Si by the RF magnetron sputtering
- 저자
- O BEOM HOAN
- 학회명
- PTS 1-5 MATERIALS SCIENCE FORUM