실리콘 광 송수신 모듈 용 MEMS 광 스위치의 제작

초록

이민우, 조수범, 이경철, 오범환, 이승걸, 박세근, 이일항, 류한권, 이현삼 We have developed a novel MEMS optical switch. To make the fabrication easy, we designed the device as simple as we can maintain the optical properties of the switch enough to use in an optical communication system. The device was fabricated by using surface micromachining technologies, and self assembled by using photoresist pad. Detailed optical properties of the switch will be discussed later.