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초록
Synthetic diamond films were deposited on pretreated WC-Co substrate in activated gas phase using RF plasma-assisted CVD. We investigated the influence of CH4 concentration gas on facets of diamond crystal. In H2-CH4 gas mixture, the oxygen addition lead to increasing XRD intensity of diamond films. The deposited diamond films were analyzed by SEM and XRD.
- 제목
- RF PACVD에 의한 초경합금상에 다이아몬드 박막의 합성
- 제목 (타언어)
- The synthesis of diamond thin film on WC-Co in RF PACVD
- 저자
- Lee Duck Chool
- 학회명
- 대한전기학회 춘계학술대회