Microstructure and Dielectric properties of PZT film by Aerosol Deposition

초록

Typical ceramic compacts are manufactured in bulk. In this process, sintering is requied. this process has a disadvantage that the grain size increases during the sintering. However, the 5-10㎛ thickness PZT [Pb(Zr0.52Ti0.48)O3] thin film in a morphotropic phase is fabricated by the aerosol-deposition(AD) method. Particles are broken into several nanometers of grains, and a thin film with a high density can be obtained by a strong physical collision. So we made PZT films with these advantages. In this study, We observed the crystallinity of PZT film at different temperatures heat treatment (450, 550, 650oC) by XRD(X-Ray Diffraction). And the Density, thickness and grainsize of the film were observed by SEM(Scanning Electron Microscopy). Dielectric properties of PZT film were measured by impedance analyzer and standard ferroelectric test system.