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AN ULTRA-SENSITIVE SENSOR PLAFORM USING MONOLITHIC 3-DIMENSIONAL INTEGRATION AND MEMBRANE-GATE FET
- 제목
- AN ULTRA-SENSITIVE SENSOR PLAFORM USING MONOLITHIC 3-DIMENSIONAL INTEGRATION AND MEMBRANE-GATE FET
- 저자
- RINO CHOI
- 학회명
- The 1st International Workshop on MEMS and Sensor System 2017
- 학회 개최일
- 2017-11-16 ~ 2017-11-17