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KMC Explanation on the Suppression of Boron Diffusion in Ge Pre-amorphized Silicon Substrate

  • WON TAEYOUNG
제목
KMC Explanation on the Suppression of Boron Diffusion in Ge Pre-amorphized Silicon Substrate
저자
WON TAEYOUNG
학회명
2006 International Micrprocesses and Nanotechnology Conference

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