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A study on the anslysis of influential factors for 300mm wafer final polishing
- 제목
- A study on the anslysis of influential factors for 300mm wafer final polishing
- 저자
- LEE EUN SANG
- 학회명
- The 16th International Symposium on Advances in Abrasive Technology
- 개최지
- Hangzhou Qiaodao Lake warm island Zhejiang Tourism Resort Hotel
- 학회 개최일
- 2013-09-24 ~ 2013-09-27