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초록
In order to design a special illuminator required for an automated optical inspection system, distributions of illuminating angles and intensities of illuminating rays incident on a specimen surface are taken into consideration. This methodology is tried to optimize coaxial illuminating systems by using the specially-coded program.
- 제목
- 자동 광검사 장비용 조명광학계 설계를 위한 국부적인 조명각 분포의 분석
- 제목 (타언어)
- Analysis of Local Distribution of Illuminating Angles for Designing Illuminators of Automated Optical Inspector
- 저자
- LEE SEUNG GOL
- 학회명
- 한국광학회 창립 20주년 기념 특별학술발표회